Multibeam scanning electron microscope: Experimental results
نویسندگان
چکیده
منابع مشابه
Multibeam scanning electron microscope: Experimental results
The authors present the first results obtained with their multibeam scanning electron microscope. For the first time, they were able to image 196 array of 14 14 focused beams of a multielectron beam source on a specimen using single beam scanning electron microscope SEM optics. The system consists of an FEI Novanano 200 SEM optics column equipped with a multielectron beam source module. The sou...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2010
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.3498749